SEM imaging and EDS elemental analysis
Even though scanning electron microscopy (SEM) has made tremendous advances, it can be considered by new users to be a complicated technique. Sample preparation, alignments, cost of ownership, and difficulties with analytical techniques prevent widespread adoption. We set out to resolve these challenges in order to make a truly accessible SEM without compromising on flexibility. Our goal was to make microscopy an easy and enjoyable experience in which you should not have to fight the microscope to obtain quality data. The result is the Thermo Scientific Axia ChemiSEM Scanning Electron Microscope, a system in which obtaining SEM-EDS data is no longer a chore. EDS is no longer just an afterthought—chemical data and imaging have now become one.
SEM EDS analysis
The Axia ChemiSEM is unlike traditional SEMs in that it always collects EDS data in the background. It uses unique algorithms to process the SEM and EDS signals simultaneously, allowing it to display the morphology and quantitative elemental make up of a sample together, in real time. It constantly processes EDS data in the background, giving you live updates on elemental data, as it is acquired. Elements found in your sample can be toggled on and off, allowing you to isolate areas of interest.
The Axia ChemiSEM features a superior user experience enhanced by automation, such as SmartAlign technology for alignment-free operation, newly developed automatic functions, and live quantitative EDS mapping. This always-on processing make analysis twice as fast, compared to traditional methods. The Axia ChemiSEM Scanning Electron Microscope puts SEM/EDS analysis within reach of a wider scientific audience, speeds up your workflow, and saves time on training.

Particle Analysis Learning Center
Live quantitative elemental mapping
Update your Analytical workflow with fully integrated, cutting-edge Thermo Scientific ChemiSEM technology that provides characterization in half the time.
Easy to get started
Integrated User Guidance, live real-time compositional imaging, and alignment-free operation combine on this instrument to allow you to stay focused on data collection.
Flexible sample loading
The flexible stage accommodates samples up to 10 kg with x-y movement, and the door opens fully for easy loading of large, awkward samples - while retaining a very fast pump down time.
Excellent imaging performance
Easily handle a wide range of applications, including insulating samples with Low Vac operation and advanced beam scanning to ensure high-fidelity imaging
Diverse application software
Handle advanced applications with advanced system automation option, such as Thermo Scientific Maps™ Software, and customize workflow development with Thermo Scientific AutoScript™ Software.
Easy maintenance
Source exchange is easy and can be completed by any user, while the straightforward design translates to high uptime and rapid service when attention is needed.
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On-demand Webinar: Meet our newest SEM
Attend this webinar to:
- Discover zero-click elemental analysis that enhances accessibility and productivity with live quantitative elemental imaging.
- Experience the future-proof flexibility of a large chamber, support of samples up to 10 kg, and enough ports to accommodate many accessories.
- Find out how you can save time with fast pumping, automatic alignments, and an easy interface.
Download our ebook, SEM and EDS Analysis in Industry, to learn more about:
- How the joint application of SEM and EDS analysis supports in-depth material characterization for industrial applications
- How our unique Thermo Scientific ChemiSEM Technology integrates these two techniques into a single, fast, easy-to-use package, which is accessible and valuable to novices and experts alike
On-demand Webinar: Meet our newest SEM
Attend this webinar to:
- Discover zero-click elemental analysis that enhances accessibility and productivity with live quantitative elemental imaging.
- Experience the future-proof flexibility of a large chamber, support of samples up to 10 kg, and enough ports to accommodate many accessories.
- Find out how you can save time with fast pumping, automatic alignments, and an easy interface.
Download our ebook, SEM and EDS Analysis in Industry, to learn more about:
- How the joint application of SEM and EDS analysis supports in-depth material characterization for industrial applications
- How our unique Thermo Scientific ChemiSEM Technology integrates these two techniques into a single, fast, easy-to-use package, which is accessible and valuable to novices and experts alike